background image
PLASMA TREATMENT
PLASMA TREATMENT
Pressure reader
Window of quartz
Ground electrode
RF electrode
Turbomolecular
pump
Rotary pump
RF
generator
Pressure reader
Window of quartz
Ground electrode
RF electrode
Turbomolecular
pump
Rotary pump
RF
generator
PECVD
PECVD
P
lasma
E
nhanced
C
himical
V
apour
D
eposition
2004,
diSTAM
- Dept. of Food Science & Microbiology
------------------------------------------------------
University of Milan www.distam.unimi.it
O
2
+Organosilicons
PLASMA
Moleculars
Ions
Electrons
radicals
Species present in the plasma phase
Si, C, H, CH,
SiO, OH, CO,
SiC
x
H
y
, SiO
x
C
y,
C
x
H
y
H
2
O, CO
2
,CO
polymer
O
2
+Organosilicons
PLASMA
Moleculars
Ions
Electrons
radicals
Species present in the plasma phase
Si, C, H, CH,
SiO, OH, CO,
SiC
x
H
y
, SiO
x
C
y,
C
x
H
y
H
2
O, CO
2
,CO
polymer
Deposition of a SiOx-Like
Deposition of a SiOx-Like
coating
coating
Gas mixture:
hexamethyldisiloxane
(HMDSO) O
2
, Ar
Electric field generator:
Radio frequency
Food packaging - 3
Food packaging - 3
rd
rd
International Symposium
International Symposium
17-19 November Barcelona