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PLASMA TREATMENT
PLASMA TREATMENT
Si-O-Si
CH
3
CH
3
CH
3
CH
3
CH
3
CH
3
HMDSO
HMDSO
high O
2
SiOx
: inorganic
Coating, high barrier
PLASMA
PLASMA
low O
2
SiCxHyOz
: organic
Coating, poor barrier
POWER enhances HMDSO cracking
POWER enhances HMDSO cracking
Low power
high CHx and SiOH
fragments
Organic coating
Food packaging - 3
Food packaging - 3
rd
rd
International Symposium
International Symposium
17-19 November Barcelona